Romang, Alvin H. and Watkins, James J.. (2010) Supercritical Fluids for the Fabrication of Semiconductor Devices: Emerging or Missed Opportunities? Chemical Reviews, 110 (1). p. 459. ISSN 0009-2665
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Official URL: http://dx.doi.org/10.1021/cr900255w
| Item Type: | Article |
|---|---|
| InterNano Taxonomy: | Informatics and Standards |
| Collections: | Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for Hierarchical Manufacturing |
| Depositing User: | Amulya Gullapalli |
| Date Deposited: | 16 Jul 2011 20:40 |
| Last Modified: | 16 Jul 2011 20:40 |
| URI: | http://eprints.internano.org/id/eprint/844 |
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