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Karimi, Pegah and Kim, Taehoon and Aceros, Juan and Park, Jingoo and Busnaina, Ahmed A.. (2010) The removal of nanoparticles from sub-micron trenches using megasonics. Microelectronic Engineering, 87 (9). p. 1665. ISSN 01679317

This list was generated on Wed May 23 10:22:20 2012 EDT.

This project is supported by the National Science Foundation under Grant No. CMMI-1025020
Center for Hierarchical Manufacturing

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