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KIM, T and YOO, Y and AHN, J and LEE, J and CHOI, J and BUSNAINA, A and PARK, J. (2008) Adhesion force change on multilayer EUVL mask due to laser induced plasma shock wave. In: 10th Annual SEMATECH Surface Preparation and Cleaning Conference (SPCC), APR 01-02, 2008, Austin, TX.

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