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Han, Ja Hyung and Koo, Ja Eung and Hong, Duk Ho and Park, Byung Lyul and Kim, Seong Il and Cho, In-Soo and Eom, Dae Hong and Park, Jin Goo and Busnaina, Ahmed A.. (2005) Effects of Patterns on Corrosion in Cu CMP. Solid State Phenomena, 103-104. p. 369. ISSN 1662-9779

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