Up a level |
Kang, Young-Jae and Prasad, Y. Nagendra and Kim, In-Kwon and Jung, Seok-Jo and Park, Jin-Goo. (2010) Synthesis of Fe metal precipitated colloidal silica and its application to W chemical mechanical polishing (CMP) slurry. Journal of Colloid and Interface Science, 349 (1). p. 402. ISSN 00219797