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Kim, Tae Gon and Wostyn, Kurt and Park, Jin Goo and Mertens, Paul W. and Busnaina, Ahmed A.. (2009) Pattern Collapse and Particle Removal Forces of Interest to Semiconductor Fabrication Process. Solid State Phenomena, 145-146. p. 47. ISSN 1662-9779

This list was generated on Thu Oct 30 19:59:48 2014 EDT.