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Dong, Jingyan and Mukhopadhyay, Deepkishore and Ferreira, Placid M. (2007) Design, fabrication and testing of a silicon-on-insulator (SOI) MEMS parallel kinematics XY stage. Journal of Micromechanics and Microengineering, 17 (6). p. 1154. ISSN 0960-1317

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