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Stuart, Colin and Xu, Qianfei and Tseng, Ricky J. and Yang, Yang and Hahn, H. Thomas and Chen, Yong and Wu, Wei and Williams, R. Stanley. (2006) Nanofabrication module integrated with optical aligner. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 24 (2). pp. 539-542. ISSN 10711023