High-Field Scanning Probe Lithography in Hexadecane: Transitioning from Field Induced Oxidation to Solvent Decomposition through Surface Modification

Suez, I. and Rolandi, M. and Backer, S. A. and Scholl, A. and Doran, A. and Okawa, D. and Zettl, A. and Fréchet, J. M. J.. (2007) High-Field Scanning Probe Lithography in Hexadecane: Transitioning from Field Induced Oxidation to Solvent Decomposition through Surface Modification. Advanced Materials, 19 (21). pp. 3570-3573. ISSN 09359648

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Abstract

High field scanning probe lithography in hexadecane leads to two different chemical reactions depending on surface hydrophilicity. On a hydrophilic surface, oxidation of the sample occurs; a hydrophobic surface, results in solvent decomposition and nanoscale deposition of etch resistant material. The features are characterized with photoelectron emission microscopy and are carbonaceous in nature with a highly cross-linked bonding network. Tone reversal in a fluorinated etch is achieved.

Item Type: Article
Uncontrolled Keywords: Organic solvents
InterNano Taxonomy: Nanomanufacturing Processes > Nanopatterning/Lithography
Nanomanufacturing Characterization Techniques > Scanning Probe Microscopy
Collections: Nanomanufacturing Research Collection
Depositing User: Moureen Kemei
Date Deposited: 02 Apr 2010 15:05
Last Modified: 02 Apr 2010 15:05
URI: http://eprints.internano.org/id/eprint/401

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