Suez, I. and Rolandi, M. and Backer, S. A. and Scholl, A. and Doran, A. and Okawa, D. and Zettl, A. and Fréchet, J. M. J.. (2007) High-Field Scanning Probe Lithography in Hexadecane: Transitioning from Field Induced Oxidation to Solvent Decomposition through Surface Modification. Advanced Materials, 19 (21). pp. 3570-3573. ISSN 09359648
Full text not available from this repository. (Request a copy)Abstract
High field scanning probe lithography in hexadecane leads to two different chemical reactions depending on surface hydrophilicity. On a hydrophilic surface, oxidation of the sample occurs; a hydrophobic surface, results in solvent decomposition and nanoscale deposition of etch resistant material. The features are characterized with photoelectron emission microscopy and are carbonaceous in nature with a highly cross-linked bonding network. Tone reversal in a fluorinated etch is achieved.
Item Type: | Article |
---|---|
Uncontrolled Keywords: | Organic solvents |
InterNano Taxonomy: | Nanomanufacturing Processes > Nanopatterning/Lithography Nanomanufacturing Characterization Techniques > Scanning Probe Microscopy |
Collections: | Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for Scalable and Integrated Nanomanufacturing |
Depositing User: | Moureen Kemei |
Date Deposited: | 02 Apr 2010 15:05 |
Last Modified: | 26 Sep 2014 21:16 |
URI: | http://eprints.internano.org/id/eprint/401 |
Actions (login required)
View Item |