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Kim, Tae Gon and Wostyn, Kurt and Park, Jin Goo and Mertens, Paul W. and Busnaina, Ahmed A.. (2009) Pattern Collapse and Particle Removal Forces of Interest to Semiconductor Fabrication Process. Solid State Phenomena, 145-146. p. 47. ISSN 1662-9779

Han, Ja Hyung and Koo, Ja Eung and Hong, Duk Ho and Park, Byung Lyul and Kim, Seong Il and Cho, In-Soo and Eom, Dae Hong and Park, Jin Goo and Busnaina, Ahmed A.. (2005) Effects of Patterns on Corrosion in Cu CMP. Solid State Phenomena, 103-104. p. 369. ISSN 1662-9779

This list was generated on Fri Oct 24 23:28:58 2014 EDT.