Accessibility of cylindrical channels within patterned mesoporous silica films using nanoparticle diffusion

Chen, Hung-Ting and Crosby, Todd A. and Park, Myoung-Hwan and Nagarajan, Sivakumar and Rotello, Vincent M. and Watkins, James J.. (2009) Accessibility of cylindrical channels within patterned mesoporous silica films using nanoparticle diffusion. Journal of Materials Chemistry, 19 (1). pp. 70-74. ISSN 0959-9428

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Abstract

Mesoporous silica films with well ordered nanochannels (approximately 7 nm in diameter) oriented parallel to the substrate were synthesized using supercritical carbon dioxide mediated silica deposition within templates comprised of triblock copolymers blended with strongly associating homopolymers. The films were patterned at the device level by conventional lithography and etched to yield periodic circular features approximately 20 µm in diameter. The nanoscale channels remained accessible to penetrant diffusion as shown by dye uptake experiments. The nanochannel arrays were used as miniature size exclusion columns to mediate nanoparticle diffusion.

Item Type: Article
Uncontrolled Keywords: SOFT LITHOGRAPHY; K DIELECTRICS; THIN-FILMS; NANOLITHOGRAPHY; NANOSTRUCTURES; MESOPHASES; TEMPLATES; GROWTH; OXIDES
InterNano Taxonomy: Nanomanufacturing Processes > Nanopatterning/Lithography > Block copolymer lithography
Nanoscale Objects and Nanostructured Materials > Nanostructured Materials
Nanoscale Objects and Nanostructured Materials > Nanocomposites > Thin films
Nanomanufacturing Processes > Deposition of Nanostructured Films or Nanostructures
Nanomanufacturing Processes > Nanopatterning/Lithography
Collections: Nanomanufacturing Research Collection > Nanomanufacturing Nanoscale Science and Engineering Centers > Center for Hierarchical Manufacturing
Nanomanufacturing Research Collection
Depositing User: Moureen Kemei
Date Deposited: 22 Feb 2010 15:29
Last Modified: 19 Sep 2011 20:39
URI: http://eprints.internano.org/id/eprint/295

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