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Number of items: 11.

Cho, Si-Hyeong and Busnaina, Ahmed A. and Park, Jin-Goo. (2010) Large Area CoNi Stress Free Electroformed Mold for Nanoimprint Lithography. In: New England Nanomanufacturing Summit 2010, June 22 - 24, 2010, Lowell, MA. (Unpublished)

Liberman, Vladimir and Yilmaz, C. and Bloomstein, T. M. and Rothschild, M. and Somu, Sivasubramanian and Echegoyen, Y. and Busnaina, Ahmed A.. (2010) Large-Area Dense Plasmonic Nanoarrays for Surface Enhanced Raman Applications. In: New England Nanomanufacturing Summit 2010, June 22 - 24, 2010, Lowell, MA. (Unpublished)

Wei, Ming and Chiota, Jason and Fang, Liang and Shearer, John and Kumar, Arun and Shen, Jia and Lee, Jun and Sivasubramanian, Somu and Xiong, Xugang and Barry, Carol F. and Busnaina, Ahmed A. and Mead, Joey L.. (2010) Template Directed Assembly of Polymer Blends into Nonuniform Geometries at Multiple Length Scales. In: New England Nanomanufacturing Summit 2010, June 22 - 24, 2010, Lowell, MA. (Unpublished)

Karimi, Pegah and Kim, Taehoon and Aceros, Juan and Park, Jingoo and Busnaina, Ahmed A.. (2010) The removal of nanoparticles from sub-micron trenches using megasonics. Microelectronic Engineering, 87 (9). p. 1665. ISSN 01679317

Kim, Tae Gon and Wostyn, Kurt and Park, Jin Goo and Mertens, Paul W. and Busnaina, Ahmed A.. (2009) Pattern Collapse and Particle Removal Forces of Interest to Semiconductor Fabrication Process. Solid State Phenomena, 145-146. p. 47. ISSN 1662-9779

Kim, Tae-Gon and Yoo, Young-Sam and Kim, Tae-Geun and Ahn, Jinho and Lee, Jong-Myoung and Choi, Jae-Sung and Busnaina, Ahmed A. and Park, Jin-Goo. (2008) Damage Free Particle Removal from Extreme Ultraviolet Lithography Mask Layers by High Energy Laser Shock Wave Cleaning. In: 20th International Microprocesses and Nanotechnology Conference, Nov 05-08, 2007, Kyoto, Japan.

Bakhtari, Kaveh and Guldiken, Rasim O. and Busnaina, Ahmed A. and Park, Jin-Goo. (2006) Experimental and Analytical Study of Submicrometer Particle Removal from Deep Trenches. Journal of The Electrochemical Society, 153 (9). C603. ISSN 00134651

Bakhtari, Kaveh and Guldiken, Rasim O. and Makaram, Prashanth and Busnaina, Ahmed A. and Park, Jin-Goo. (2006) Experimental and Numerical Investigation of Nanoparticle Removal Using Acoustic Streaming and the Effect of Time. Journal of The Electrochemical Society, 153 (9). G846. ISSN 00134651

Park, Jin-Goo and Lee, Sang-Ho and Ryu, Ju-Suk and Hong, Yi-Koan and Kim, Tae-Gon and Busnaina, Ahmed A.. (2006) Interfacial and Electrokinetic Characterization of IPA Solutions Related to Semiconductor Wafer Drying and Cleaning. Journal of The Electrochemical Society, 153 (9). G811. ISSN 00134651

Han, Ja Hyung and Koo, Ja Eung and Hong, Duk Ho and Park, Byung Lyul and Kim, Seong Il and Cho, In-Soo and Eom, Dae Hong and Park, Jin Goo and Busnaina, Ahmed A.. (2005) Effects of Patterns on Corrosion in Cu CMP. Solid State Phenomena, 103-104. p. 369. ISSN 1662-9779

Guldiken, O. and Bakhtari, K. and Busnaina, Ahmed A. and Park, J.. (2005) Metrology and Removal of Nanoparticles from 500 Micron Deep Trenches. Solid State Phenomena, 103-104. p. 137. ISSN 1662-9779

This list was generated on Sun Sep 21 01:54:37 2014 EDT.